Publication | Closed Access
Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
31
Citations
15
References
2015
Year
Materials ScienceSno2 Thin FilmsEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsChemical DepositionO2 PlasmaChemical Vapor DepositionThin Film Processing
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