CMOS-based technology for integrated optoelectronics: a modular approach

Abstract

The optoelectronic version of an existing industrial 2 /spl mu/m CMOS process has been developed. With the new technology, single mode strip waveguides, photodiodes and waveguide-to-photodiode couplers have been integrated together with standard CMOS devices. Thanks to a modular approach, the properties of the core process have not been altered. The bandwidth of the basic system, consisting of a curved waveguide coupled to a photodiode and a transimpedance amplifier, is higher than 1.5 MHz at a wavelength of 780 nm. As an example, an unbalanced interferometer with on-chip amplifier has been qualified.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>