Publication | Closed Access
The effect of ozone concentration during atomic layer deposition on the properties of ZrO2 films for capacitor applications
16
Citations
33
References
2016
Year
Materials ScienceEngineeringCorrosionOxide ElectronicsSurface ScienceApplied PhysicsOzone ConcentrationThin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionZro2 Films
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