Publication | Closed Access
A photocurable leaky dielectric for highly electrical insulating electrohydrodynamic micro-/nanopatterns
14
Citations
32
References
2016
Year
Liquid Leaky DielectricEngineeringPhotocurable Leaky DielectricLeaky Dielectric CharacteristicNanoelectronicsPrinted ElectronicsPhotopolymer NetworkNanoscale ScienceNanolithography MethodMaterials ScienceElectroactive MaterialElectrical EngineeringNanoscale SystemNanotechnologyElectrical PropertyNanomaterialsMicrofabricationApplied PhysicsNano Electro Mechanical SystemTypical Ehdp ProcessesElectrical Insulation
This communication describes an innovative photocurable leaky dielectric for electrohydrodynamic patterning (EHDP). Based on the well-designed molecular structure, the material in its liquid state exhibits low viscosity, high homogeneity, and more importantly a leaky dielectric characteristic; meanwhile, UV light irradiation transforms it from a liquid leaky dielectric into a solid perfect dielectric instantaneously via an interfacial reaction. Two typical EHDP processes have confirmed that the beneficial properties of this material help to rapidly fulfill a higher aspect ratio and/or smaller feature size patterning compared to its perfect dielectric counterpart. Therefore, this material provides the potential in accessing high-performance EHDP towards fabricating electrically insulating micro-/nanostructures.
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