A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing

Abstract

A linear array of microscale thermal anemometers has been designed, fabricated and characterized. The sensitive element consists of a self-compensated-stress multilayer (Ni/W) patterned to form a wire with length, width, and thickness close to 200 μm, 5 μm and 2 μm respectively. The wire is deposited and supported by prongs made of nano-crystalline diamond (NCD) of about 2 μm in thickness. Due to its high Young's modulus, NCD allows a very high mechanical toughness without the need for thicker support for the hot wire. Also, depending on grain size, the NCD is able to present thermal conductivity smaller than 10 W mK−1, providing good thermal insulation from the substrate and less conductive end losses to the prongs. The sensor was characterized experimentally. Its electrical and thermal properties were obtained first in the absence of fluid flow. The results confirm the effectiveness of thermal insulation and the mechanical robustness of the structure. The fluidic characterizations were performed and analysed in the case of an airflow with velocities of up to 30 m s−1.