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Influence of the Si particle size on the mechanical stability of Si-based electrodes evaluated by in-operando dilatometry and acoustic emission

Si-based ElectrodesEngineeringMicrofabricationNanoelectronicsMechanical EngineeringApplied PhysicsSi Particle SizeVacuum DeviceInstrumentationSilicon On InsulatorMicroelectronicsAcoustic EmissionMicromachined Ultrasonic Transducer