Microscale Silicon Origami

Abstract

A new methodology to create 3D origami patterns out of Si nanomembranes using pre-stretched and pre-patterned polydimethylsiloxane substrates is reported. It is shown this approach is able to mimic paper-based origami patterns. The combination of origami-based microscale 3D architectures and stretchable devices will lead to a breakthrough on reconfigurable systems.