Some Notes on Ultrasoft X-Ray Fluorescence Analysis—10 to 100 Å Region^*

Abstract

Abstract Methods and instrumentation have heen developed for the extension of X-ray fluorescence analysis into the light element region, magnesium through beryllium. Examples of current values for the minimum detectable limits for these elements and associated instrumental parameters are presented. Some specific techniques are described for the use of an ultrasoft X-ray vacuum spectrograph, for the development of large d -spacing multilayer analyzers, and for the construction of thin window systems.