Effect of wear of diamond wire on surface morphology, roughness and subsurface damage of silicon wafers - Concepedia

Concepedia

Publication | Closed Access

Effect of wear of diamond wire on surface morphology, roughness and subsurface damage of silicon wafers

102

Citations

35

References

2016

Year

Arkadeep Kumar, Steffi Kaminski, Shreyes N. Melkote, Chris Arcona

Diamond-like CarbonSubsurface DamageEngineeringMicrofabricationMechanical EngineeringApplied PhysicsSurface ScienceDiamond WireSemiconductor Device FabricationWear-resistant MaterialSurface MorphologyMicrostructureWear Resistance

References

	Year	Citations

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