Sensors and Actuators A Physical · 2016 · 48 citations · 31 references
EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignBistable Electrostatic ActuatorsBistable MechanismsBistable Mems ActuatorsElectrostatic Mems ActuatorsElectrostatic Microactuators
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