Study of a wheel-like electrorheological finishing tool and its applications to small parts

Abstract

A wheel-like electrorheological finishing (ERF) tool for small parts polishing is proposed and thoroughly studied. First, the electrorheological polishing fluid is tested, and its properties suggest usability for electrorheological fluid-assisted finishing. Then, the mathematical removal model of the ERF tool is built employing the conformal mapping method and high-order multipolar moment theory. Finally, a micropattern of trough is fabricated on a slide glass (7 mm wide and 1 mm thick). The trough is 70 nm deep, and its flat bottom is 1.5 m wide (peak to valley of 3.16 nm and root mean square of 1.27 nm); the surface roughness finally achieves 0.86 nm. The results demonstrate the stable machining capability of the ERF tool for miniature parts.