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Material removal model of chemical mechanical polishing for fused silica using soft nanoparticles

Materials ScienceChemical EngineeringEngineeringMaterial ProcessingNanomaterialsMicrofabricationSoft NanoparticlesAbrasive ProcessChemical Mechanical PolishingSurface TreatmentSoft MatterSurface PolishingAbrasive MachiningMaterial Removal ModelMaterial Preparation