Publication | Closed Access
Local functionalization of CMOS-compatible Si3N4 Mach-Zehnder interferometers with printable functional polymers
20
Citations
34
References
2016
Year
Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationNanotechnologyLocal FunctionalizationApplied PhysicsPrinted ElectronicsSilicenePrintable Functional PolymersSilicon On InsulatorMicroelectronicsFunctional Materials3D PrintingNanolithography Method
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