Publication | Closed Access
Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow
64
Citations
40
References
2016
Year
Materials ScienceHydrocarbon FilmsEngineeringSurface ScienceApplied PhysicsSubstrate TemperatureChemical Vapor DepositionHydrogenGas Discharge PlasmaNonthermal PlasmaPlasma Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1