Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow

Yu. V. Fedoseeva, G. A. Pozdnyakov, A. V. Okotrub, M. A. Kanygin, Yu. V. Nastaushev, O. Yu. Vilkov, Lyubov G. Bulusheva

Applied Surface Science · 2016 · 66 citations · 40 references

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