Sensors and Actuators A Physical · 2016 · 13 citations · 22 references
EngineeringMaterials EngineeringMaterials ScienceNanotechnologySensorsThin FilmsMems SensorsMicroelectromechanical SensorsOptical Thin FilmsSensor MaterialsThin-film DepositionThin-film MaterialsNano SensorsNanostructured SensorsThin-film Sensors
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