Publication | Open Access
A 50–100 GHz ohmic contact SPDT RF MEMS silicon switch with dual axis movement
16
Citations
12
References
2016
Year
Electrical EngineeringEngineeringRf SemiconductorMicrofabricationRadio Frequency Micro-electromechanical SystemsHigh-frequency DeviceApplied PhysicsSilicon On InsulatorMicroelectronicsMicro-electromechanical SystemRf SubsystemDual Axis Movement
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