Hybrid layered polymer slot waveguide Young interferometer

Abstract

We demonstrate a polymer slot waveguide Young interferometer coated with a bilayer of Al₂O₃/TiO₂. The approach enables relaxed dimensions of the polymer waveguide which simplifies the fabrication of the structure with a resolution of 50 nm. The layers were coated by an atomic layer deposition technique. The feasibility of the device was investigated by exploiting the interferometric structure as a bulk refractive index sensor operating at 975 nm wavelength for detection of an ethanol-water solution. A refractive index change of 1 × 10^-6 RIU with a sensing length of only 800 µm was detected. The approach confirms the possibility of realizing a low cost device with a small footprint and enhanced sensitivity by employing the TiO₂ rails in the sides of the slot waveguide.