Electron beam-generated Ar/N2 plasmas: The effect of nitrogen addition on the brightest argon emission lines

Abstract

The effect of nitrogen addition on the emission intensities of the brightest argon lines produced in a low pressure argon/nitrogen electron beam-generated plasmas is characterized using optical emission spectroscopy. In particular, a decrease in the intensities of the 811.5 nm and 763.5 nm lines is observed, while the intensity of the 750.4 nm line remains unchanged as nitrogen is added. To explain this phenomenon, a non-equilibrium collisional-radiative model is developed and used to compute the population of argon excited states and line intensities as a function of gas composition. The results show that the addition of nitrogen to argon modifies the electron energy distribution function, reduces the electron temperature, and depopulates Ar metastables in exchange reactions with electrons and N2 molecules, all of which lead to changes in argon excited states population and thus the emission originating from the Ar 4p levels.