Publication | Closed Access
Wafer‐Scale, Homogeneous MoS<sub>2</sub> Layers on Plastic Substrates for Flexible Visible‐Light Photodetectors
211
Citations
26
References
2016
Year
EngineeringOptoelectronic DevicesStoichiometric Mos2 LayersSemiconductor NanostructuresSemiconductorsWafer Scale ProcessingPhotodetectorsFlexible Visible‐light PhotodetectorsPlastic SubstratesAppropriate SolutionCompound SemiconductorPolyimide FilmsMaterials ScienceOxide HeterostructuresElectrical EngineeringOxide ElectronicsOptoelectronic MaterialsOxide SemiconductorsFlexible ElectronicsApplied PhysicsMultilayer HeterostructuresOptoelectronics
An appropriate solution is suggested for synthesizing wafer-scale, continuous, and stoichiometric MoS2 layers with spatial homogeneity at the low temperature of 450 °C. It is also demonstrated that the MoS2 -based visible-light photodetector arrays are both fabricated on 4 inch SiO2 /Si wafer and polyimide films, revealing 100% active devices with a narrow photocurrent distribution and excellent mechanical durability.
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