Plasma Propulsion of a Metallic Microdroplet and its Deformation upon Laser Impact

Abstract

Shining a short, intense laser pulse on micrometer-sized droplets of liquid metal creates a plasma that is a bright source of extreme ultraviolet (EUV) light. The authors study in detail the propulsion and deformation of such droplets due to a laser ``kick'', and unveil the underlying mechanisms and scaling laws. Optimizing EUV plasma sources for next-generation nanolithography requires a deep understanding of both droplet-laser coupling and droplet fluid-dynamical response, which this work provides.