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Design, fabrication and characterization of thin film resistances for heat flux sensing application

Materials ScienceElectrical EngineeringThin Film ResistancesEngineeringSpecific ResistanceMicrofabricationHeat FluxApplied PhysicsThin Film Process TechnologyThermal ConductionElectronic PackagingHeat TransferThin FilmsThermal EngineeringThermal SensorThin Film Processing