Thermal stability and structural evolution of low-K Fluorinated amorphous carbon during thermal annealing - Concepedia

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Thermal stability and structural evolution of low-K Fluorinated amorphous carbon during thermal annealing

10

Citations

8

References

1998

Year

Hongning Yang, D. J. Tweet, Yanjun Ma, Tue Nguyen, David Evans, S.T. Hsu

MRS Proceedings

Materials ScienceCarbonizationEngineeringGlassy CarbonCarbon-based MaterialApplied PhysicsStructural EvolutionAmorphous SolidThermal Stability

References

	Year	Citations

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