Fabrication of Highly Efficient Full-color Electroluminescent Device Composed of Nanocrystalline Silicon

Abstract

We fabricated a highly-efficient full-color electroluminescent device composed of nanocrystalline silicon (nc-Si). High luminance red, green and blue luminescence from the device was achieved by using hydrofluoric acid solution and oxidation techniques, because these techniques lead to reduction of both nc-Si size and P(b)-center on the surface, which is related closely to luminescent color and luminance, respectively. Moreover, direct current (DC) operating voltage on red/green/blue light emission of the device was realized at a relative low value below 10.0 V by controlling the thickness of the oxidized layer on the nc-Si surface. These results are a strong indication that the device developed in this study can be adapted to future flat panel display and illumination fields.