Concepedia

Publication | Closed Access

CW CO2-laser annealing of arsenic implanted silicon

DOI

24

Citations

20

References

1980

Year

M. Takai, Pei-Hsin Tsien, S. C. Tsou, D. Röschenthaler, M. Ramin, H. Ryssel, Ingolf Rüge
Applied Physics A

References

YearCitations

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