Defect Content Evaluation in Single-Crystal AlN Wafers - Concepedia

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Defect Content Evaluation in Single-Crystal AlN Wafers

10

Citations

9

References

2005

Year

Robert T. Bondokov, Kenneth E. Morgan, Raj Shetty, Wayne Liu, Glen A. Slack, Mark S. Goorsky, L. J. Schowalter

MRS Proceedings

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringApplied PhysicsDefect FormationDefect ToleranceDefect Content EvaluationCrystallography

References

	Year	Citations

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