Epitaxial CoSi<sub>2</sub> Film Formation on (100) Si by Annealing of Co/Ti/Si Structure in N<sub>2</sub> - Concepedia

Concepedia

Publication | Closed Access

Epitaxial CoSi<sub>2</sub> Film Formation on (100) Si by Annealing of Co/Ti/Si Structure in N<sub>2</sub>

19

Citations

7

References

1993

Year

Shinichi Ogawa, M. F. Lawrence, Amala Dass, J. A. Fair, Takashi Kouzaki, David B. Fraser

MRS Proceedings

Materials EngineeringSemiconductorsMaterials ScienceEngineeringApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationThin FilmsMolecular Beam EpitaxyEpitaxial GrowthCo/ti/si Structure

References

	Year	Citations

Page 1