Journal of Sol-Gel Science and Technology · 1994 · 21 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsCoatingsSemiconductor Thin FilmsThin Film Electrical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsSemiconductor Oxide Thin FilmsSilica-based MaterialsSilicide CoatingsSilicon DioxideThin Oxide FilmsThin-film OxidesTitanium Oxides
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