Multilayer Fabrication Process for Josephson Junction Circuits Cross-Compatible Over Two Foundries

Abstract

We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.