Journal of the Ceramic Society of Japan · 1995 · 22 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor MaterialsSensorsThin FilmsGas SensorsMetal OxidesOxide SemiconductorsComplex OxidesMetal Oxide Gas SensorsMetal Oxide Sensor MaterialsSemiconductor Oxide Thin FilmsSpinel OxidesSpinel StructureThin-film OxidesZinc Oxides
Thick Zn2SnO4 films have the highest sensitivities to NO2 among the examined complex oxides with spinel structure. Although the NO2-gas sensitivities of thick Zn2SnO4 films decrease with increasing temperature, high sensitivities are obtained in the temperature range of 573 to 673K. The sensitivities of the present Zn2SnO4 films are comparable to those of NO2-sensitive oxides such as WO3 and ZnO.