An analytical thermal-structural model of a gas-sealed capacitive pressure sensor with a mechanical temperature compensation structure

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 215 citations

Electrical Engineering, Biomedical Sensors, Engineering +15

Analytical Electroacoustic Model of a Piezoelectric Composite Circular Plate

Suryanarayana Prasad, Quentin Gallas, Stephen Horowitz et al. · AIAA Journal · 2006 · 121 citations

Aeroacoustics, Audio Electroacoustics, Engineering +17

Free vibration analysis of piezoelectric coupled thin and thick annular plate

Wenhui Duan, Ser Tong Quek, Quan Wang · Journal of Sound and Vibration · 2004 · 87 citations

Engineering, Piezoelectric Nanogenerators, Mechanics +11

A silicon directly bonded capacitive absolute pressure sensor

Fang He, Qing‐An Huang, Ming Qin · Sensors and Actuators A Physical · 2006 · 60 citations

Engineering, Sensor Design, Instrumentation +2

Capacitive pressure sensors with stainless steel diaphragm and substrate

Sung‐Pil Chang, Mark G. Allen · Journal of Micromechanics and Microengineering · 2004 · 43 citations

Biomedical Sensors, Engineering, Micromachines +14