Publication | Closed Access
Growth and Structure of Microcrystalline Silicon by Reactive DC Magnetron Sputtering
11
Citations
3
References
1992
Year
Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringMicrofabricationApplied PhysicsReactive Dc MagnetronSemiconductor Device FabricationMicrocrystalline SiliconSilicon On InsulatorMicroelectronicsThin Film ProcessingMicrostructureMagnetic Medium
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