Synthesis of WO3 Nanorods by Thermal CVD at Various Gas Flow Rates and Substrate Temperatures

Abstract

Tungsten oxide (WO3) nanomaterials have been extensively researched for applications such as semiconductor gas sensors and photocatalysis. We have synthesized WO3 nanorods (diameters: 100–150 nm; lengths: 400–500 nm) with high yields by thermal chemical vapor deposition (CVD). In our unique two-step heating process, catalysts were not required in the temperature zone (500–600C) of substrate. It suggests the experimental conditions played a dominant role in the growth of WO3 nanorods, espe-cially in the case of the O2 flow rate and substrate temperature. Moreover, this relatively simple growth process can lead to effec-tive large-scale production of WO3 nanorods.