Laser Fabrication of Large-Scale Nanoparticle Arrays for Sensing Applications

TLDR

The study develops a high‑speed method for fabricating large‑scale periodic arrays of 40–200 nm nanoparticles. The method uses nanosphere lithography combined with laser‑induced transfer to embed spherical nanoparticles into a polymer substrate and arrange them in a hexagonal array. The resulting sensor achieves a sensitivity of 365 nm/RIU and a figure of merit of 21.5 in the visible range.

Abstract

A novel method for high-speed fabrication of large scale periodic arrays of nanoparticles (diameters 40-200 nm) is developed. This method is based on a combination of nanosphere lithography and laser-induced transfer. Fabricated spherical nanoparticles are partially embedded into a polymer substrate. They are arranged into a hexagonal array and can be used for sensing applications. An optical sensor with the sensitivity of 365 nm/RIU and the figure of merit of 21.5 in the visible spectral range is demonstrated.