Publication | Open Access
Lifetime degradation and regeneration in multicrystalline silicon under illumination at elevated temperature
147
Citations
12
References
2016
Year
EngineeringMc-si Bulk DissolveElevated TemperatureIntegrated CircuitsSilicon On InsulatorDefect TolerancePhotovoltaicsSemiconductorsMaterials ScienceElectrical EngineeringBlock-cast Multicrystalline SiliconCrystalline DefectsBias Temperature InstabilityDefect FormationSemiconductor Device FabricationDevice ReliabilityCarrier Lifetime EvolutionSilicon DebuggingApplied PhysicsLifetime DegradationMulticrystalline SiliconOptoelectronicsSolar Cell Materials
We examine the carrier lifetime evolution of block-cast multicrystalline silicon (mc-Si) wafers under illumination (100 mW/cm2) at elevated temperature (75°C). Samples are treated with different process steps typically applied in industrial solar cell production. We observe a pronounced degradation in lifetime after rapid thermal annealing (RTA) at 900°C. However, we detect only a weak lifetime instability in mc-Si wafers which are RTA-treated at 650°C. After completion of the degradation, the lifetime is observed to recover and finally reaches carrier lifetimes comparable to the initial state. To explain the observed lifetime evolution, we suggest a defect model, where metal precipitates in the mc-Si bulk dissolve during the RTA treatment.
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