RSC Advances · 2016 · 103 citations · 34 references
Optical MaterialsEngineeringRadio FrequencyGas SensorThin Film Process TechnologyRelated Sensor PropertiesMagnetismNanoelectronicsGas Sensing PropertiesThin Film ProcessingMaterials ScienceMaterials EngineeringElectrical EngineeringOxide ElectronicsElectrochemical Gas SensorApplied PhysicsThin FilmsRf PowerOptoelectronicsZno Thin Films
The effect of Radio Frequency (RF) power on the properties of magnetron sputtered Al doped ZnO thin films and the related sensor properties are investigated.
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