Chip‐Scale Fabrication of High‐<i>Q</i> All‐Glass Toroidal Microresonators for Single‐Particle Label‐Free Imaging

Abstract

Whispering-gallery-mode microresonators enable materials for single-molecule label-free detection and imaging because of their high sensitivity to their micro-environment. However, fabrication and materials challenges prevent scalability and limit functionality. All-glass on-chip microresonators significantly reduce these difficulties. Construction of all-glass toroidal microresonators with high quality factor and low mode volume is reported and these are used as platforms for label-free single-particle imaging.