2015 · 60 citations · 3 references
EngineeringElectrical EngineeringMaterials ScienceMagnetic MaterialsMicroelectronicsThin FilmsCmos Circuit DesignCoupled CircuitsIntegrated Circuit DesignIntegrated Circuit FabricationMagnetic Thin FilmsRadio-frequency Integrated CircuitsCircuit IntegrationCmos Fabrication ProcessesCmos Radio-frequency CircuitsCurrent DensityInductor DesignInductorsMagnetic CoresMonolithic Architecture
This paper presents the fabrication, design and electrical performance of magnetic thin-film inductors for monolithic integration with CMOS for DC-DC power conversion. Magnetic core inductors were fabricated using conventional CMOS processes to achieve peak inductance density of 290nH/mm2, quality factor 15 at 150MHz, current density exceeding 11 A/mm2 and coupling coefficient of 0.89 for coupled inductors.
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Review of On-Chip Inductor Structures With Magnetic Films
Donald S. Gardner, G. Schrom, Fabrice Paillet et al. · IEEE Transactions on Magnetics · 2009 · 332 citations