Concepedia

Abstract

Processes of e-beam and holographic recording of surface relief structures using Ge5As37S58-Se multilayer nanostructures as registering media were studied in this paper. Optical properties of Ge5As37S58, Se layers, and Ge5As37S58-Se multilayer nanostructures were investigated. Spectral dependencies of refractive index were analyzed within the frames of single oscillator model. Values of optical band gaps for Ge5As37S58, Se layers, and Ge5As37S58-Se multilayer nanostructures were obtained from Tauc dependencies. Using e-beam and holographic recording, diffraction gratings were fabricated in Ge5As37S58-Se multilayer nanostructures. Images of Ukraine and Moldova state emblems were obtained by e-beam recording. Image size consisted of 512 × 512 pixels (size of 1 pixel was ~2 μm). Ge5As37S58-Se multilayer nanostructures are perspective for the direct recording of holographic diffraction gratings and other optical elements.

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