C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Abstract

A wireless temperature sensor for the measurement of temperatures up to 600C was developed. The passive sensor is based on SAW resonators on Langasite substrate. To support temperatures up to 600C, new processes for front-end and back-end were developed and new material parameters for simulation of SAW devices on Langasite had to be determined. The results for the applied metallization system are discussed. Novel and reliable solutions in the field of assembly technology of a high-temperature surface mount package are presented.