Reusable silicon shadow mask with sub-5 μm gap for low cost patterning - Concepedia

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Reusable silicon shadow mask with sub-5 μm gap for low cost patterning

18

Citations

20

References

2016

Year

Pankaj Agarwal, Shuvam Pawar, S. Madhava Reddy, Prabhash Mishra, Ajay Agarwal

Sensors and Actuators A Physical

EngineeringLow Cost PatterningMicrofabricationSub-5 μM GapComputer Engineering

References

	Year	Citations

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