Concepedia

Publication | Closed Access

Simple millimeter-scale robot using Pb(Zr, Ti) piezoelectric thin film actuator on titanium substrate

DOI

15

Citations

23

References

2016

Year

Hirotaka Hida, Yuki Morita, Fumiya Kurokawa, Yuichi Tsujiura, Isaku Kanno
Microsystem Technologies

References

YearCitations

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