Publication | Closed Access
The study of wet etching on GaN surface by potassium hydroxide solution
47
Citations
16
References
2016
Year
Materials ScienceElectrical EngineeringEngineeringSurface ScienceApplied PhysicsGan SurfaceAluminum Gallium NitrideGan Power DevicePotassium Hydroxide SolutionPlasma EtchingSurface ProcessingCategoryiii-v Semiconductor
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