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Surface properties and biological behaviour of Si-DLC coatings fabricated by a multi-target DC–RF magnetron sputtering method for medical applications

Materials ScienceBiological BehaviourEngineeringMicrofabricationMaterials FabricationSi-dlc CoatingsSurface ScienceSurface EngineeringSurface TreatmentBiomedical EngineeringMulti-functional CoatingSurface ProcessingProtective CoatingMulti-target Dc–rf Magnetron