Deposition of Sr_xLa_2-xCuO_4-y Thin Films by Sputtering

Abstract

Superconducting Sr x La 2- x CuO 4- y thin films were deposited on heated substrate by sputtering. Crystalline films were obtained by setting substrate temperature T c above 450°C. In this process, there were 2 peculiar features as follows; (1) deviation of film composition from that of target (such as Cu deficiency and excess of oxygen) and (2) change of target surface with an increase of the number of the deposition. Films of almost single phase of K 2 NiF 4 structure were obtained by adjusting film composition and T s above 550°C. Tc onset up to 42 K was obtained for as-deposited films, though its reproducibility was limited by the change of target.