Concepedia

Publication | Closed Access

Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

DOI

18

Citations

38

References

2015

Year

Leon Hamui, B.M. Monroy, K.H. Kim, Alejandra López-Suárez, J. Santoyo‐Salazar, M. López‐López, Pere Roca i Cabarrocas, G. Santana
Materials Science in Semiconductor Processing

References

YearCitations

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