Experimental Study of Low-Pressure Water Jet Assisted Laser Drilling on Al<sub>2</sub>O<sub>3</sub> Ceramic

Abstract

The direct laser drilling could bring the recast layer and micro cracks, here introduced a new method named low-pressure water jet assisted laser drilling.It mainly studied some factors influence on the surface and inwall morphologies of Al2O3 ceramic when using low-pressure water jet, such as auxiliary gas pressure、pulse energy、repeated frequency.By optimizing the parameters, it can get the better surface and inwall morphologies. The results show that, taking advantage of the erosion of water jet, the composite drilling can obviously lessen molten slags, in order to reduce the recast layer and micro cracks, the processing quality can be improved much.