Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an "Atom Chip"

Abstract

A new spring shape is designed for a MEMS three dimensional electrostatic actuator. A low spring constant in Z direction for a thick structural layer is achieved. Characteristic features and challenges of this design are described and the analytical analysis is verified by FEM simulations using CoventorWareTM. The analytical models are derived for two types of serpentine springs namely a square serpentine spring (SSS) and curved serpentine spring (CSS). The analytical results are in very good agreement with the simulations.