Publication | Open Access
Advanced Nanofabrication using Helium, Neon and Gallium Ion Beams in the Carl Zeiss Orion NanoFab Microscope
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2013
Year
Gallium Ion BeamsEngineeringElectron MicroscopyPhysicsMicroscopyNanotechnologyAugust 4Microscopy MethodApplied PhysicsMicroanalysisElectron Microscope– August 8Ion BeamNanofabricationAdvanced NanofabricationMicroanalysis 2013Electron Optic
Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.