Atomic Layer Deposition of Gold Metal

Abstract

ADVERTISEMENT RETURN TO ISSUEPREVCommunicationNEXTAtomic Layer Deposition of Gold MetalMatthew B. E. Griffiths, Peter J. Pallister, David J. Mandia, and Seán T. Barry*View Author Information Department of Chemistry, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada*Prof. Seán T. Barry. E-mail: [email protected]Cite this: Chem. Mater. 2016, 28, 1, 44–46Publication Date (Web):December 28, 2015Publication History Received23 November 2015Revised28 December 2015Published online30 December 2015Published inissue 12 January 2016https://pubs.acs.org/doi/10.1021/acs.chemmater.5b04562https://doi.org/10.1021/acs.chemmater.5b04562rapid-communicationACS PublicationsCopyright © 2015 American Chemical SocietyRequest reuse permissionsArticle Views6057Altmetric-Citations88LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InRedditEmail Other access optionsGet e-AlertscloseSupporting Info (1)»Supporting Information Supporting Information SUBJECTS:Atomic layer deposition,Deposition,Gold,Metals,Plasma Get e-Alerts