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Development of high-thermal-conductive SiC ceramics
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1988
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Materials EngineeringMaterials ScienceElectrical EngineeringSemiconductorsEngineeringSi SemiconductorsCeramicsHigh-thermal-conductive Sic CeramicsApplied PhysicsHeat DissipationHeat TransferSilicon On InsulatorGreater HeatCeramic TechnologyEngineering CeramicStructural CeramicSemiconductor Device
Large semiconductor chips generate greater heat. Therefore, heat dissipation has become a serious problem. To dissipate heat from semiconductor chips, a new type of substrate material is needed. A new generation of SiC ceramics has been developed which is suitable as substrate materials for Si semiconductors.